Spectral characteristics of an injection-controlled XeF(C→A) excimer laser

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Abstract
The spectral output characteristics of an injection‐controlled XeF(C→A) excimer laser pumped by a short pulse (10 ns), high current density (250 A/cm2) electron beam are reported. A tuning bandwidth of 50 nm full width half maximum, centered at 490 nm, with a peak specific energy density of 1.3 J/l was measured using an injection laser intensity of ∼2 MW/cm2. Continuously tuned output across the entire blue‐green region (450–530 nm) with an energy density exceeding 0.2 J/l was achieved. Injection beam spectral linewidths as narrow as 0.001 nm were shown to be preserved in the XeF(C→A) laser output.