Non-linearity in length measurement using heterodyne laser Michelson interferometry

1 October 1987

journal article
research article
Published by IOP Publishing in Journal of Physics E: Scientific Instruments

Vol. 20 (10) , 1290-1292
https://doi.org/10.1088/0022-3735/20/10/034

Abstract

Heterodyne laser Michelson interferometry is widely used in precision length measurement but the accuracy is often limited by the unknown size of the periodic non-linearity due to imperfect separation of the two optical frequencies. A method for measuring this non-linearity with an accuracy of about 0.15 nm using pressure scanning of the interferometer is described and results are given for three configurations of a commercial measuring system.

Keywords

This publication has 6 references indexed in Scilit:

A stable interferometer supporting system
Journal of Physics E: Scientific Instruments, 1986
Heterodyne interferometer to measure vibration parameters
Measurement Techniques, 1984
A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer Range
Japanese Journal of Applied Physics, 1983
Analysis of the measurement error of the parameters of mechanical vibrations
Measurement Techniques, 1980
Laser Heterodyne System for Measurement and Analysis of Vibration
The Journal of the Acoustical Society of America, 1970
ZEEMAN LASER INTERFEROMETER
Applied Physics Letters, 1966