Epitaxial growth of ferroelectric PbTiO3thin films by metalorganic chemical vapor deposition
- 1 May 1997
- journal article
- research article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 195 (1) , 187-190
- https://doi.org/10.1080/00150199708260517
Abstract
High-quality PbTiO3 thin films have been grown on LaAlO3 and SrTiO3 substrates by metalorganic chemical vapor deposition. The as-deposited films were examined using scanning electron microscopy and x-ray diffraction techniques. The films were mirror-like smooth and fine-grained, the PbTiO3 films on LaAlO3 were epitaxially grown with (001) and (100) double textures and the films on SrTiO3 were near single crystal epitaxyKeywords
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