Fast, Accurate Secondary-Electron Yield Measurements at Low Primary Energies
- 1 April 1973
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (4) , 456-462
- https://doi.org/10.1063/1.1686155
Abstract
We describe a method of accurately measuring the secondary electron yield of solids over the entire incident energy range of 0–1000 eV in less than 30 msec using a commercial LEED/Auger system. Particular attention is paid to the region of low‐energy incident electrons (Ep=0 to 100 eV), and the spatial and energy resolution there are considered. The method is fast enough to see temporal changes in yield on the scale of hundreds of milliseconds. Criteria for measuring the yield of semi‐insulators are considered, as well as measurements of fine structure in the yield near Ep=0 eV.Keywords
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