Epitaxial ferroelectric Pb(Zr, Ti)O3 thin films on Si using SrTiO3 template layers

In this letter, we report on the integration of epitaxial ferroelectric ${\mathrm{Pb(Zr, Ti)O}}_{\mathrm{3}}$ (PZT) thin films on Si [100] substrates using a ${\mathrm{SrTiO}}_{\mathrm{3}}$ (STO) template layer and a conducting perovskite ${\mathrm{(La}}_{\mathrm{0.5}}{\mathrm{Sr}}_{\mathrm{0.5}}{\mathrm{)CoO}}_{\mathrm{3}}$ electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric $d_{33}$ coefficients compared to textured and untextured polycrystalline films.