Experimental characterization of a hydrogen/argon cascaded arc plasma source
- 1 April 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (4) , 1469-1471
- https://doi.org/10.1063/1.1144949
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A two-dimensional nonequilibrium model of cascaded arc plasma flowsPhysics of Fluids B: Plasma Physics, 1991
- Amorphous hydrogenated silicon films produced by an expanding argon-silane plasma investigated with spectroscopic IR ellipsometryThin Solid Films, 1991
- Conductivity of Seeded Atmospheric Pressure PlasmasJournal of Applied Physics, 1961