The formation of porous silicon by chemical stain etches
- 1 June 1986
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 75 (3) , 408-414
- https://doi.org/10.1016/0022-0248(86)90082-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- An experimental and theoretical study of the formation and microstructure of porous siliconJournal of Crystal Growth, 1985
- Microstructure and formation mechanism of porous siliconApplied Physics Letters, 1985
- A new dielectric isolation method using porous siliconSolid-State Electronics, 1981
- Stain films on siliconJournal of Physics and Chemistry of Solids, 1960
- On the Mechanism of Chemically Etching Germanium and SiliconJournal of the Electrochemical Society, 1960
- Electrolytic Shaping of Germanium and SiliconBell System Technical Journal, 1956