Display Quality SOI by Recrystallization of Bridged Silicon Islands on Quartz
- 1 January 1984
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Solidification‐Front Modulation to Entrain Subboundaries in Zone‐Melting Recrystallization of Si on SiO2Journal of the Electrochemical Society, 1983
- Stress-enhanced carrier mobility in zone melting recrystallized polycrystalline Si films on SiO2-coated substratesApplied Physics Letters, 1982
- Zone-melting recrystallization of encapsulated silicon films on SiO2—morphology and crystallographyApplied Physics Letters, 1982
- Annealing and anomalous high-energy electron irradiation effects in low-cost silicon N+P solar cellsApplied Physics Letters, 1981