Ion mixing in Si/Ge layered structures
- 1 February 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 64 (1-4) , 108-112
- https://doi.org/10.1016/0168-583x(92)95447-y
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- When is thermodynamics relevant to ion-induced atomic rearrangements in metals?Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Ion beam mixing in amorphous silicon I. Experimental investigationNuclear Instruments and Methods, 1981