Micromachined SPM probes with sub-100 nm features at tip apex
- 1 May 1999
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 27 (5-6) , 299-301
- https://doi.org/10.1002/(sici)1096-9918(199905/06)27:5/6<299::aid-sia510>3.0.co;2-v
Abstract
No abstract availableKeywords
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