Nanometer Spatial Resolution Achieved in Hard X-Ray Imaging and Laue Diffraction Experiments
- 14 January 1994
- journal article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 263 (5144) , 201-203
- https://doi.org/10.1126/science.8284671
Abstract
Tapered glass capillaries have successfully condensed hard x-ray beams to ultrasmall dimensions providing unprecedented spatial resolution for the characterization of materials. A spatial resolution of 50 nanometers was obtained while imaging a lithographically prepared gold pattern with x-rays in the energy range of 5 to 8 kiloelectron volts. This is the highest resolution scanning x-ray image made to date with hard x-rays. With a beam 360 nanometers in diameter, Laue diffraction was observed from the smallest sample volume ever probed by x-ray diffraction, 5 x 10(-3) cubic micrometers.Keywords
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