Integrated Hybrid Pressure Sensor Using a Piezoresistive Thickfilm Sensor Element
- 1 February 1987
- proceedings article
- Published by SAE International
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Engine Management Systems in Hybrid TechnologyPublished by SAE International ,1986
- Thick film pressure transducersMicroelectronics Journal, 1986
- Piezoresistive Properties of Thick‐film Resistors An OverviewMicroelectronics International, 1986
- Silicon Micromachining Technology for Automotive ApplicationsPublished by SAE International ,1986
- Characteristics and Performances of Thick Film Pressure Sensors for Automotive ApplicationsSAE International Journal of Advances and Current Practices in Mobility, 1982
- Changes in thick-film resistor values due to substrate flexureMicroelectronics Reliability, 1973