A replaceable, low thermal mass hot stage for scanning probe microscopy

Publisher Website
Google Scholar
Abstract
We describe the design, construction, and characterization of a hot stage for use in scanning probe microscopy. The hot stage incorporates a heater and thermometer on a single 10×10×0.5 mm silicon chip, allowing rapid thermal response, uniform heat distribution, and low power operation. This design facilitates the incorporation of microfabricated features on the hot stage surface, which we illustrate with a SiN x step edge 30 nm high. Samples to be imaged can also be applied or fabricated directly on the chip. Individual chips can be easily inserted into and removed from a small sample holder, which provides spring contact electrodes to an external temperature controller; wire bonding is not required. The chip and holder combined are 15×15×12 mm.