The influence of target oxidation and growth-related effects on the electrical properties of reactively sputtered films of tin-doped indium oxide
- 1 June 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 80 (4) , 373-382
- https://doi.org/10.1016/0040-6090(81)90604-0
Abstract
No abstract availableKeywords
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