The combined effects of Fe and H2 on the nitridation of silicon
- 1 August 1982
- journal article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 1 (8) , 337-340
- https://doi.org/10.1007/bf00726480
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Fluoride accelerated nitridation of siliconJournal of Materials Science, 1979
- The influence of hydrogen in the nitriding gas on the strength, structure and composition of reaction-sintered silicon nitrideJournal of Materials Science, 1979
- A mechanism for the nitridation of Fe-contaminated siliconJournal of Materials Science, 1978
- Effect of Fe and Al additions on nitridation of siliconJournal of Materials Science, 1977
- Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1976
- Effect of H2‐N2 Nitriding Atmospheres on the Properties of Reaction‐Sintered Si3N4Journal of the American Ceramic Society, 1975