Relaxation of excited species in He/N2pulsed RF discharges: kinetics of metastable species
- 1 May 1995
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 4 (2) , 212-223
- https://doi.org/10.1088/0963-0252/4/2/005
Abstract
The relaxation in the afterglow of excited species produced in a pulsed parallel plate RF discharge of N2 and/or He has been investigated. Diagnostic aspects about the measurement of the electron energy distribution function by time-resolved Langmuir probe, of the decay of N2(A3 Sigma u+, V=0,4) and He(23S) metastable by LIF spectroscopy, and of N2(C3 Pi u,V'), N2+(B2 Sigma u+, V') species by time-resolved emission spectroscopy are examined. The features of the relaxation of such species in the afterglow are reviewed in the light of some elementary electron and metastable kinetics which affect the properties of the afterglow in a millisecond timescale.Keywords
This publication has 43 references indexed in Scilit:
- Production of active species in a common flowing post-discharge of an Ar-N2plasma and an Ar-H2-CH4plasmaJournal of Physics D: Applied Physics, 1994
- Relaxation of the electron energy in the post-discharge of an He-N2mixturePlasma Sources Science and Technology, 1993
- Energy transfer studies on N2(X 1Σ+g,v) and N2(B 3Πg)The Journal of Chemical Physics, 1992
- He-N2 radiofrequency discharge: Influence of N2 on discharge and afterglowPlasma Chemistry and Plasma Processing, 1991
- Electron energy distribution functions in He/N2 mixtures in the presence of metastable statesSpectrochimica Acta Part B: Atomic Spectroscopy, 1990
- Downstream microwave plasma-enhanced chemical vapor deposition of oxide using tetraethoxysilaneJournal of Applied Physics, 1990
- Electron energy distribution functions under N2 discharge and post-discharge conditions: A self-consistent approachChemical Physics, 1988
- Preparation of silicon nitride films at room temperature using double-tubed coaxial line-type microwave plasma chemical vapor deposition systemJournal of Applied Physics, 1987
- Non-equilibrium vibrational kinetics of CO pumped by vibrationally excited nitrogen molecules: A comparison between theory and experimentChemical Physics, 1987
- Population of N2 (B 3Πg) by N2 (A3Σu+) during the nitrogen afterglowThe Journal of Chemical Physics, 1973