Production of active species in a common flowing post-discharge of an Ar-N2plasma and an Ar-H2-CH4plasma
- 14 March 1994
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 27 (3) , 504-508
- https://doi.org/10.1088/0022-3727/27/3/012
Abstract
No abstract availableKeywords
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