The coming opportunities in microsensor systems
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Challenges and opportunities confronting the development of integrated sensing systems in the 1990s are discussed. Silicon microsensors can offer significant advantages over alternative technologies, employing features such as self-testing, autocalibration, digital compensation, and bus-compatibility to improve system reliability and performance while reducing cost. A system architecture which permits all of these features to be implemented is described. Each node in this distributed sensing system is composed of sensors, actuators, and a monolithic microprocessor-driven interface chip and is realized as a multichip module. A discrete prototype of this system achieves 12-b accuracy with the ability to read over 700 sensors per second. All data transfers include parity checking and polynomial-based sensor data compensation in the host computer. Over 300 Mbytes of data have been transferred error-free. Needs for further research in these areas are described, and the application of the prototype system to the measurement of pressure, flow, wafer temperature, and other variables in a reactive ion etching system is discussed.> Author(s) Wise, K.D. Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA Najafi, N.Keywords
This publication has 18 references indexed in Scilit:
- A thin-film gas detector for semiconductor process gasesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A Thermal Absolute-pressure Sensor With On-chip Digital Front-end ProcessorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- A 1024-element high-performance silicon tactile imagerIEEE Transactions on Electron Devices, 1990
- Wide dynamic range direct accelerometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- A multi-element monolithic mass flowmeter with on-chip CMOS readout electronicsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- An implantable CMOS analog signal processor for multiplexed microelectrode recording arraysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Surface micromachining for microsensors and microactuatorsJournal of Vacuum Science & Technology B, 1988
- Analysis, design, and performance of micropower circuits for a capacitive pressure sensor ICIEEE Journal of Solid-State Circuits, 1986
- An implantable multielectrode array with on-chip signal processingIEEE Journal of Solid-State Circuits, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982