He-atom diffraction from nanostructure transmission gratings: The role of imperfections

The relative diffraction peak intensities of He atoms with an incident beam energy of 65 meV diffracted from a microfabricated 100 nm-period transmission grating are analyzed using both Fresnel and Fraunhofer diffraction theory. The projected slit width could be varied from 50 nm down to less than 1 nm by inclining the grating at angles up to ${\Theta }_0=42\mathrm{}°$ with respect to the incident beam. Good agreement between calculated and measured peak intensities, up to the sixth order, is obtained by accounting for random deviations in the slit positions, and averaging over the velocity spread of the incident beam as well as the spatial extent of the nozzle beam source. It is demonstrated that He atom beam diffraction together with simple transmission measurements is an excellent means of characterizing such gratings including a detailed determination of the slit width, the bar shape, and random as well as periodic disorder.