Spreading resistance analysis based on the method of regularisation
- 31 January 1993
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 36 (1) , 1-11
- https://doi.org/10.1016/0038-1101(93)90063-v
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Spreading resistance analysis with carrier spilling correctionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Extraction of semiconductor dopant profiles from spreading resistance data: An inverse problemSolid-State Electronics, 1990
- Optimization of the spreading resistance profiling technique for submicron structuresSolid-State Electronics, 1990
- Comparison of carrier profiles from spreading resistance analysis and from model calculations for abrupt doping structuresApplied Physics Letters, 1987
- An efficient numerical scheme for spreading resistance calculations based on the variational methodSolid-State Electronics, 1983
- Between carrier distributions and dopant atomic distribution in beveled silicon substratesJournal of Applied Physics, 1982
- An Efficient Integration Technique for Use in the Multilayer Analysis of Spreading Resistance ProfilesJournal of the Electrochemical Society, 1981
- A multilayer exponential model for spreading resistance calculationsSolid-State Electronics, 1979
- Application of Multilayer Potential Distribution to Spreading Resistance Correction FactorsJournal of the Electrochemical Society, 1969
- Smoothing by spline functionsNumerische Mathematik, 1967