Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure
- 30 September 1998
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 33 (9) , 1331-1337
- https://doi.org/10.1016/s0025-5408(98)00117-2
Abstract
No abstract availableKeywords
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