Dislocation-accelerated impurity-induced layer disordering of AlxGa1−xAs-GaAs quantum well heterostructures grown on GaAs-on-Si
- 6 November 1989
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (19) , 1993-1995
- https://doi.org/10.1063/1.102143
Abstract
Data are presented showing that dislocations and Si autodiffusion promote accelerated layer disordering of AlxGa1−xAs‐GaAs quantum well heterostructures grown on GaAs‐on‐Si ‘‘substrates’’ via metalorganic chemical vapor deposition. The accelerated impurity‐induced layer disordering is more extreme at higher temperatures (>800 °C) and virtually nonexistent at lower temperatures (≲775 °C).Keywords
This publication has 12 references indexed in Scilit:
- Autodoping of GaAs grown by organometallic vapor phase epitaxy on silicon substratesApplied Physics Letters, 1989
- Atom diffusion and impurity-induced layer disordering in quantum well III-V semiconductor heterostructuresJournal of Applied Physics, 1988
- Dislocation reduction by impurity diffusion in epitaxial GaAs grown on SiApplied Physics Letters, 1988
- Stability of 300 K continuous operation of p-n AlxGa1−xAs-GaAs quantum well lasers grown on SiApplied Physics Letters, 1987
- Room-temperature continuous operation of p-n AlxGa1−xAs-GaAs quantum well heterostructure lasers grown on SiApplied Physics Letters, 1987
- Continuous (300 K) photopumped laser operation of AlxGa1−xAs‐GaAs quantum well heterostructures grown on strained‐layer GaAs on SiApplied Physics Letters, 1987
- Low-threshold high-efficiency AlGaAs-GaAs double-heterostructure injection lasers grown on Si substrates by metalorganic chemical vapor depositionApplied Physics Letters, 1987
- Defect reduction by thermal annealing of GaAs layers grown by molecular beam epitaxy on Si substratesApplied Physics Letters, 1987
- Significant improvement in crystalline quality of molecular beam epitaxially grown GaAs on Si (100) by rapid thermal annealingApplied Physics Letters, 1986
- Disorder of an AlAs-GaAs superlattice by impurity diffusionApplied Physics Letters, 1981