Microroughness induced on solids by ion bombardment: I. Experimental results on sputtering of aluminium by A+ (15 keV); quantification of microroughness
- 1 July 1979
- journal article
- Published by Elsevier in Surface Science
- Vol. 85 (2) , 353-364
- https://doi.org/10.1016/0039-6028(79)90258-9
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Secondary−ion mass spectrometry and its use in depth profilingJournal of Vacuum Science and Technology, 1975
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- Surface of Iron Bombarded with Argon and Oxygen IonsJapanese Journal of Applied Physics, 1974
- Effect of oxygen on the sputtering of aluminium targets bombarded with argon ionsInternational Journal of Mass Spectrometry and Ion Physics, 1973
- The sputtering of oxides part i: a survey of the experimental resultsRadiation Effects, 1973