Design, analysis, and performance of UHF oscillators using thin-film resonator-based devices as the feedback element
- 13 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Thin-film bulk-acoustic-wave resonators (TFR) and TFR-based devices are synthesized using monolithic integrated circuit techniques. AlN and ZnO are used for piezoelectric transduction. The design, analysis, and operation of a series of 1-GHz fundamental mode single-line, comb-line, and voltage-controlled oscillators using several topological variations of TFR-based filters as the feedback element are discussed. SPICE linear and nonlinear closed-loop simulations and a perturbational S-parameter measurement technique are used for design and analysis. TFR circuit representations are based on a modified Butterworth-VanDyke model with values extracted from a TOUCHSTONE optimization routine. Phase noise performance ranges from -70 dBc/Hz to -100 dBc/Hz depending on the TFR topology and oscillator function. Although these oscillators were fabricated as hybrid circuits, monolithic realizations combining the TFR and active devices on the same silicon substrate have been demonstrated.Keywords
This publication has 9 references indexed in Scilit:
- Thin film microwave acoustic filters on GaAsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A thin-film bulk-acoustic-wave resonator-controlled oscillator on siliconIEEE Electron Device Letters, 1987
- Design and Performance of Oscillators Using Semiconductor Delay LinesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1987
- Recent Advances in Monolithic Film Resonator TechnologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1986
- Thin Film Resonator Based Low Insertion Loss FiltersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1986
- Acoustic bulk wave composite resonatorsApplied Physics Letters, 1981
- Equivalent Circuit Modeling of Stacked Crystal FiltersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1981
- Fundamental-mode VHF/UHF minature acoustic resonators and filters on siliconApplied Physics Letters, 1980
- Stacked-crystal filtersProceedings of the IEEE, 1973