Surface modification of InP by plasma techniques using hydrogen and oxygen
- 1 April 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 78 (3) , 271-278
- https://doi.org/10.1016/0040-6090(89)90593-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- An investigation by electron spectroscopy for chemical analysis of chemical treatments of the (100) surface of n-type InP epitaxial layers for Langmuir film depositionThin Solid Films, 1980
- An investigation of the vacuum UV spectra of inductivity coupled RF plasmas excited in inert gases as a function of some of the operating parametersJournal of Polymer Science: Polymer Chemistry Edition, 1980
- Microstructure of plasma-deposited a-Si : H filmsApplied Physics Letters, 1979
- Esca applied to polymers. XXIII. RF glow discharge modification of polymers in pure oxygen and helium–oxygen mixturesJournal of Polymer Science: Polymer Chemistry Edition, 1979
- ESCA applied to polymers. XVIII. RF glow discharge modification of polymers in helium, neon, argon, and kryptonJournal of Polymer Science: Polymer Chemistry Edition, 1978
- Inp/langmuir-film m.i.s.f.e.t.IEE Journal on Solidstate and Electron Devices, 1978