Characterization of quantum wells by X-ray diffraction
- 14 April 1993
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 26 (4A) , A142-A145
- https://doi.org/10.1088/0022-3727/26/4a/030
Abstract
Measurements of the intensity distribution in diffraction space yield information far beyond that available by simple profiles. This paper briefly reviews the parameters obtainable from quantum well structures, when using conventional double-crystal and slit-based diffractometers, and shows how further structural parameters can be extracted by diffraction space mapping. To interpret subtle features a ' delta -function like' diffraction probe has been used to be sure of the origin of some of the features observed. The influence of layer tilting and lattice relaxation on the diffraction process can lead to imprecise fits, but from a diffraction space map, and including the diffuse scattering, further valuable information is extracted. The interpretation of these features has required additional modification to dynamical theory and the use of multiple-crystal topography. Examples of some unusual diffraction effects with possible explanations are also given.Keywords
This publication has 13 references indexed in Scilit:
- The simulation and interpretation of diffraction profiles from partially relaxed layer structuresJournal of Applied Crystallography, 1992
- Multicrystal X-ray diffraction of heteroepitaxial structuresApplied Surface Science, 1991
- Interface roughness and period variations in the AlGaAs system grown by molecular beam epitaxySemiconductor Science and Technology, 1991
- A high-resolution multiple-crystal multiple-reflection diffractometerJournal of Applied Crystallography, 1989
- Interface roughness and period variations in MQW structures determined by X-ray diffractionJournal of Applied Crystallography, 1988
- Composition and lattice-mismatch measurement of thin semiconductor layers by x-ray diffractionJournal of Applied Physics, 1987
- X-ray diffraction of multilayers and superlatticesActa Crystallographica Section A Foundations of Crystallography, 1986
- The Theory of Dynamical X-Ray Diffraction on a SuperlatticePhysica Status Solidi (b), 1983
- X-ray diffraction study of interdiffusion and growth in (GaAs)n(AlAs)m multilayersJournal of Applied Physics, 1980
- Theorie der Ausbreitung von Röntgen-Wellenfeldstrahlen im schwach deformierten KristallgitterThe European Physical Journal A, 1964