Morphology of Silicon Islands Grown By Selective Epitaxy Over Silicon Dioxide
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A three-dimensional CMOS design methodologyIEEE Journal of Solid-State Circuits, 1984
- Growth Process of Silicon Over SiO2 by CVD: Epitaxial Lateral Overgrowth TechniqueJournal of the Electrochemical Society, 1983