Chemical and electrical properties of cavities in silicon and germanium
- 1 December 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 106 (1-4) , 379-385
- https://doi.org/10.1016/0168-583x(96)80033-4
Abstract
No abstract availableKeywords
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