Monoatomic step observation on Si(111) surfaces by force microscopy in air
- 20 May 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (20) , 2225-2227
- https://doi.org/10.1063/1.104934
Abstract
The structure of a vicinal Si(111) stepped surface is analyzed by force microscopy in air to reveal a fine structure in a step bunching area, and a monoatomic step in a terrace region. Step heights of one to three monoatomic layers were also observed on a debunched Si(111) surface. These steps have low crystallographic indices [112̄], [101̄], [01̄1], [213̄], and [ 1̄2̄3]. The force microscope images were in good agreement with scanning electron microscope and reflection electron microscope images observed in ultrahigh vacuum just after sample annealing by resistive heating.Keywords
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