MICROSTRUCTURE AND PROPERTIES OF ION PLATED Ti-B-N FILMS
- 1 January 1990
- journal article
- Published by SAGE Publications in Surface Engineering
- Vol. 6 (1) , 41-44
- https://doi.org/10.1179/sur.1990.6.1.41
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Electrical characteristics of TiN contacts to N siliconJournal of Applied Physics, 1981