A 10Gb/s photonic modulator and WDM MUX/DEMUX integrated with electronics in 0.13/spl mu/m SOI CMOS
- 1 January 2006
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 01936530,p. 922-929
- https://doi.org/10.1109/isscc.2006.1696133
Abstract
Monolithic integration of both photonic and electronic components operating at 10Gb/s in a 0.13mum SOI CMOS process for PowerPC processors is presented. A modulator uses free carrier plasma dispersion in a reverse-biased PIN optical phase shifter in a Mach-Zender interferometer. An AWG demultiplexer uses a forward-biased PIN phase shifter to compensate the optical path length improving the channel separationKeywords
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