Atomic force profiling by utilizing contact forces
- 15 January 1988
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 63 (2) , 570-572
- https://doi.org/10.1063/1.340089
Abstract
Atomic force microscopy (AFM) is a new technology currently being developed. Stylus profilometry (SP) was developed earlier. A procedure is reported here which combines features of both SP and AFM. In this approach a stylus scans a sample surface and responds to contact forces. Force values are maintained within the elastic range of the sample, and high resolution is achieved by means of a sensitive tunnel gap feedback circuit control. Initial tests of performance have been conducted over a range of applied loads with tungsten styluses on phlogopite mica samples to image lamellar steps with subnanometer resolution.This publication has 6 references indexed in Scilit:
- Atomic Resolution with Atomic Force MicroscopeEurophysics Letters, 1987
- Atomic force microscope–force mapping and profiling on a sub 100-Å scaleJournal of Applied Physics, 1987
- Atomic Force MicroscopePhysical Review Letters, 1986
- Squeezable electron tunneling junctionsApplied Physics Letters, 1983
- Stylus measurement techniques: A contribution to the problem of parameter variationWear, 1982
- Three-dimensional stylus profilometryWear, 1982