Detection efficiency in atom-probe time-of-flight mass spectrometry
- 1 April 1986
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 19 (4) , 276-281
- https://doi.org/10.1088/0022-3735/19/4/006
Abstract
A method is presented of determining the absolute detection efficiency of an atom-probe time-of-flight spectrometer. Using this procedure, the volume method, one can avoid the sensitivity to the probe hole position which is an inescapable problem with the previously used method of counting the number of detected atoms per evaporated atomic layer. The detection efficiency of the atom-probe instrument used in the present investigation was found to be 57+or-9%.Keywords
This publication has 9 references indexed in Scilit:
- Performance of a microchannel plate ion detector in the energy range 3-25 keVJournal of Physics E: Scientific Instruments, 1985
- THE DETERMINATION OF GRAIN BOUNDARY SEGREGATION PROFILES IN BORON CONTAINING AUSTENITIC STAINLESS STEELS USING TEM, AP AND IAPLe Journal de Physique Colloques, 1984
- Performance of the new high mass resolution time of flight atom probeReview of Scientific Instruments, 1981
- The simulation of FIM desorption patternsPhilosophical Magazine A, 1981
- Field calibration using the energy distribution of a free-space field ionizationJournal of Applied Physics, 1977
- Investigations of field evaporation with a field-desorption microscopeSurface Science, 1976
- Aiming performance of the atom probeReview of Scientific Instruments, 1975
- Field Calibration Using the Energy Distribution of Field IonizationPhysical Review Letters, 1973
- Field Ionization of Gases at a Metal Surface and the Resolution of the Field Ion MicroscopePhysical Review B, 1956