X-ray photoelectron spectroscopy and Raman spectroscopy investigations of amorphous SixC1x(H) coatings obtained by chemical vapour deposition from thermally labile organosilicon compounds
- 1 March 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 101 (1) , 83-96
- https://doi.org/10.1016/0040-6090(83)90495-9
Abstract
No abstract availableThis publication has 32 references indexed in Scilit:
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