Macroparticles on TiN films prepared by the arc ion plating process
- 5 December 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 43-44, 324-335
- https://doi.org/10.1016/0257-8972(90)90085-q
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Ion flux characteristics in arc vapor deposition of TiNSurface and Coatings Technology, 1988
- Cathode-spot arc coatings: Physics, deposition and heating rates, and some examplesSurface and Coatings Technology, 1987
- Adhesion and structure of TiN arc coatingsThin Solid Films, 1987
- Cathodic arc deposition technologySurface and Coatings Technology, 1986
- Ion-assisted thin film deposition and applicationsVacuum, 1986
- Fast deposition of metallurgical coatings and production of surface alloys using a pulsed high current vacuum arcThin Solid Films, 1986
- Ion plating with an arc sourceVacuum, 1986
- Problems in the physical vapour deposition of titanium nitrideThin Solid Films, 1985
- A cold-cathode hall plasma acceleratorJournal of Applied Mechanics and Technical Physics, 1981
- Analysis of the Electrode Products Emitted by dc Arcs in a Vacuum AmbientJournal of Applied Physics, 1969