Ion flux characteristics in arc vapor deposition of TiN
- 1 December 1988
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 36 (1-2) , 243-255
- https://doi.org/10.1016/0257-8972(88)90154-5
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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