Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 56-60
- https://doi.org/10.1016/s0924-4247(98)00112-5
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Analytical static modelling and optimization of electrostatic micropumpsJournal of Micromechanics and Microengineering, 1997
- Modeling micropumps with electrical equivalent networksJournal of Micromechanics and Microengineering, 1996
- A piezoelectric-driven stereolithography-fabricated micropumpJournal of Micromechanics and Microengineering, 1995