Integration of silicon photonics in bulk CMOS
- 1 June 2014
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 07431562,p. 1-2
- https://doi.org/10.1109/vlsit.2014.6894427
Abstract
The first monolithic process flow integrating silicon photonics on operational bulk CMOS has been developed. Features include deep-trench isolation, polysilicon waveguides, grating couplers, filters, modulators, and detectors. Fully functional on-chip CMOS enables Tx/Rx operation while minimizing interconnect parasitics. With the addition of an external 1280nm source, a fully functional optical link (5Gb/s 2.8pJ/b), capable of wavelength division multiplexing, has been demonstrated. In addition to the polysilicon resonant detector used in the link, a monolithically-integrated Silicon-Germanium selective epitaxial growth based photodetector was developed.Keywords
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