A theoretical analysis of the electret air-gap field-effect structure for sensor applications
- 1 February 1986
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 9 (1) , 59-72
- https://doi.org/10.1016/0250-6874(86)80007-5
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Theoretical considerations in the design of integrated semiconductor sensors applying electretsIEEE Transactions on Electron Devices, 1985
- Capacitive pressure transducers with integrated circuitsSensors and Actuators, 1983
- A piezoresistive integrated pressure sensorSensors and Actuators, 1983
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Theoretical response of condenser microphonesThe Journal of the Acoustical Society of America, 1978
- Properties of a movable-gate–field-effect structure as an electromechanical sensorThe Journal of the Acoustical Society of America, 1978