Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition
- 1 January 2001
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 19 (1) , 158-166
- https://doi.org/10.1116/1.1326940
Abstract
We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices.Peer reviewed: NoNRC publication: NKeywords
This publication has 54 references indexed in Scilit:
- Fabrication of submicrometer regular arrays of pillars and helicesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- On Electromagnetic Waves in Biaxial Bianisotropic MediaElectromagnetics, 1999
- Sculptured thin films—II. Experiments and applicationsMaterials Research Innovations, 1999
- Bound states in photonic crystal waveguides and waveguide bendsPhysical Review B, 1998
- Advanced techniques for glancing angle depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Sculptured thin films—I. ConceptsMaterials Research Innovations, 1997
- Oblique evaporation and surface diffusionThin Solid Films, 1997
- Columnar structure and texture of iron films prepared at various evaporation ratesThin Solid Films, 1987
- Active Zone of Growing Clusters: Diffusion-Limited Aggregation and the Eden ModelPhysical Review Letters, 1984
- The dependence of the uniaxial magnetic anisotropy in evaporated films on the angle of incidenceCzechoslovak Journal of Physics, 1961