Second order optical nonlinearities of radio frequency sputter-deposited AlN thin films
- 22 November 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (21) , 2875-2877
- https://doi.org/10.1063/1.110311
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- On the properties of AlN thin films grown by low temperature reactive r.f. sputteringThin Solid Films, 1986
- Basal orientation aluminum nitride grown at low temperature by rf diode sputteringJournal of Applied Physics, 1982
- Radiofrequency reactive sputtering for deposition of aluminium nitride thin filmsThin Solid Films, 1971
- Light Waves at the Boundary of Nonlinear MediaPhysical Review B, 1962