High Tc Superconductivity of rf-sputtered Er-Ba-Cu-O Films

Abstract
High T c Er-Ba-Cu-O superconducting films were prepared by r f sputtering. The films revealed superconducting transition temperatures for onset and zero resistance of 95 K and 84 K, respectively. Although the X-ray diffraction measurement showed the film consists of an orthorhombic structure with the lattice constants a, b and c, respectively, of 3.883 Å, 3.830 Å and 11.70 Å, most of the surface layer was found by electron spectroscopy for chemical analysis (ESCA) to be significantly Er-deficient.

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