Continuous amorphous antimony thin films obtained by low-energy cluster beam deposition
- 16 September 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (12) , 1421-1423
- https://doi.org/10.1063/1.105326
Abstract
We have prepared continuous amorphous antimony thin films by low-energy cluster beam deposition. Contrary to the antimony films prepared by molecular beam deposition, this new technique allows preparation of continuous amorphous films which are stable at room temperature. This study has been carried out by combining electrical measurements and transmission electron microscopy observations.Keywords
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