Charge Damage Caused by Electron Shading Effect
- 1 October 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (10R)
- https://doi.org/10.1143/jjap.33.6013
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Thin oxide charging current during plasma etching of aluminumIEEE Electron Device Letters, 1991
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