Reflection and transmission ellipsometry of a uniform layer
- 1 November 1987
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 4 (11) , 2096-2100
- https://doi.org/10.1364/josaa.4.002096
Abstract
We examine the general properties of the ellipsometric quantities ρ = rp/rs and τ = tp/ts for a nonabsorbing uniform film. At fixed angle of incidence and for variable thickness, τ moves periodically along circles (as is known) and ρ along quartics in the complex plane. For the special case of a film between like media we derive envelopes (and corresponding bounds on τ and ρ) as functions of the dielectric constants of the layer and its bounding medium. In the case of unlike media on either side of the film, bounds are found for Re τ and Im τ for ∊2 > ∊1∊2 (where ∊1, ∊, and ∊2 are, respectively, the dielectric constants of the medium from which light is incident, of the film, and of the substrate), we find an approximate upper bound for the ellipsometric quantity (defined as Im ρ when Re ρ = 0).
Keywords
This publication has 2 references indexed in Scilit:
- Relationship between the p and s Fresnel reflection coefficients of an interface independent of angle of incidenceJournal of the Optical Society of America A, 1986
- Polar curves for transmission ellipsometryOptics Communications, 1975