Ion beam effects on the surface and on the bulk of thin films of polymethylmethacrylate
- 1 August 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 116 (1-4) , 168-172
- https://doi.org/10.1016/0168-583x(96)00029-8
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Chemical modification of PMMA by MeV and GeV, light and heavy, ion irradiationsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
- Irradiation of PMMA with high energy light ions: The depth distribution for volatile reaction-product emissionRadiation Effects and Defects in Solids, 1994
- Hydrogenated carbon layers produced by ion beam irradiation of PMMA and polystyrene filmsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Ultralow dose effects in ion-beam induced grafting of polymethylmethacrylate (PMMA)Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Resist exposure with light ionsJournal of Vacuum Science & Technology B, 1983
- Ion bombardment of resistsNuclear Instruments and Methods in Physics Research, 1983
- Ion beam exposure characteristics of resists: Experimental resultsJournal of Applied Physics, 1982
- Fast Neutron Irradiation Effects on Polymers. 1. Degradation of Poly(methyl methacrylate)Macromolecules, 1979
- Ion Beam Exposure of Resist MaterialsJournal of the Electrochemical Society, 1979
- Polymeric Electron Beam ResistsJournal of the Electrochemical Society, 1969