The characteristics of the ion and neutral fluxes incident on the substrate in an ion plating discharge
- 1 January 1984
- Vol. 34 (1-2) , 295-300
- https://doi.org/10.1016/0042-207x(84)90145-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Interface broadening during ion platingRadiation Effects, 1980
- Effect of Space Charge in Cold-Cathode Gas DischargesPhysical Review B, 1958