Architecture combination by micro photoforming process

Publisher Website

17 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/memsys.1994.555625

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

Photoforming applied to fine machining
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
Design and fabrication of light driven micropump
Published by Institute of Electrical and Electronics Engineers (IEEE) ,1992