Design and fabrication of light driven micropump
- 1 January 1992
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A laser-light-driven micromechanical pump for fluids has been designed and fabricated. The fabrication process consists of photolithography and anisotropic wet etching. The pump consists of an array of microcells with membranes that are actuated by a light-heated working fluid. These cells are covered by a thin glass plate with an 18- mu m gap that makes a flow channel. Actuation light input of approximately 11 mW per cell is required for operation. An operation frequency of 3 Hz is expected on the basis of the basic experiments made. Typical fluid pumping displacements are approximately 30 nl per cycle. It is noted that since this device operates in a reasonably low temperature range, there is no evidence of thermal influence being given to the human body.<>Keywords
This publication has 10 references indexed in Scilit:
- A piezo-electric pump driven by a flexural progressive wavePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface-machined micromechanical membrane pumpPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A micro chemical analyzing system integrated on a silicon waferPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Preliminary investigation of micropumping based on electrical control of interfacial tensionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromachined silicon microvalvePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Prototype micro-valve actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micropump and sample-injector for integrated chemical analyzing systemsSensors and Actuators A: Physical, 1990
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990
- An electrohydrodynamic micropumpPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Normally closed microvalve and mircopump fabricated on a silicon waferSensors and Actuators, 1989