Raman study of different phases in ion implanted silicon
- 1 March 1990
- journal article
- Published by Elsevier in Journal of Molecular Structure
- Vol. 219, 141-145
- https://doi.org/10.1016/0022-2860(90)80046-m
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Structural relaxation and order in ion-implanted Si and GePhysical Review B, 1988
- Raman study of phase transitions in ion-implanted andQ-switched neodymium-doped yttrium aluminum garnet laser annealed siliconPhysical Review B, 1987
- Investigation of structural correlations in disordered materials by Raman scattering measurementsJournal of Non-Crystalline Solids, 1987
- Raman scattering from ion-implanted siliconPhysical Review B, 1985